ABSTRACT Calculating Depth Profiles for Angle Dependent X-ray Photo Electron Spectroscopy Data is a mathematically unstable problem. As a result, the answer obtained will be strongly influenced by the algorithm used in the calculation. In this work, a regularization algorithms and a two-layer algorithm are compared. The two layer algorithm has superior performance when the data contains only random, normally distributed error. The Tyler algorithm, however, proves superior when systematic error is present in the data and when the true depth profile is not simply two uniform layers.
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