ABSTRACT MOVPE for compound semiconductors is today the most versatile technology for the making of thin film layers for complex micro- and optolectronic devices, due to its flexible and scalable nature (in case of horizontal reactors) as a CVD technology, compared to MBE or other methods. A state-of-the-art overview on its advantages, evolution and today`s scaling range from single wafer MOVPE for university and R&D application through to fully automated mass production technology of up to 95 x 2`` or 20 x 4`` wafers is provided. The materials include III-V, II-VI, SiC, and others. The applications are HEMT, HBT, LASER, VCSEL, LED, solar cells, photocathodes, and others.
Buy this Article
|