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Current Topics in Crystal Growth Research   Volumes    Volume 1 
Abstract
MOCVD for compound semiconductors
Holger Jürgensen
Pages: 301 - 318
Number of pages: 18
Current Topics in Crystal Growth Research
Volume 1 

Copyright © 1994 Research Trends. All rights reserved

ABSTRACT
 
MOVPE for compound semiconductors is today the most versatile technology for the making of thin film layers for complex micro- and optolectronic devices, due to its flexible and scalable nature (in case of horizontal reactors) as a CVD technology, compared to MBE or other methods. A state-of-the-art overview on its advantages, evolution and today`s scaling range from single wafer MOVPE for university and R&D application through to fully automated mass production technology of up to 95 x 2`` or 20 x 4``  wafers is provided. The materials include III-V, II-VI, SiC, and others. The applications are HEMT, HBT, LASER, VCSEL, LED, solar cells, photocathodes, and others.
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