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Current Topics in Crystal Growth Research  → Volumes  →  Volume 3 
Abstract
Epitaxial growth and characterization of InN and AlxIn1-xN
Qixin Guo, Hiroshi Ogawa, Akira Yoshida
Pages: 19 - 32
Number of pages: 14
Current Topics in Crystal Growth Research
Volume 3 
Copyright © 1997 Research Trends. All rights reserved

ABSTRACT
 
In this article, the microwave-excited metalorganic vapor phase epitaxy of InN and AlxIn1-xN is described. Structural properties and thermal annealing effect on the crystalline quality of InN films are presented.
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