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Trends in Vacuum Science & Technology   Volumes    Volume 4 
Abstract
Modelling nanomechanics of bulk copper and copper connections
Eero Ristolainen, Pekka Heino
Pages: 101 - 109
Number of pages: 9
Trends in Vacuum Science & Technology
Volume 4 

Copyright © 2001 Research Trends. All rights reserved

ABSTRACT

Mechanical properties of bulk copper and copper interfaces have been studied at the nanometer scale using computer simulations. Attention is paid to dislocations, stacking faults, grain boundaries and interfaces with tantalum. These issues are becoming more and more important in the electronics industry because of copper metallization and decreasing line widths.

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