ABSTRACT Field emission of electrons from diamond-like carbon (DLC) coated different Si surfaces is compared. Thin films of DLC were coated on smooth and rough surfaces of Si and Si micro-tips using pulsed ArF laser deposition. All DLC deposited surfaces exhibited electron emission in the electric field of 15-28 V/μm range which was lower than uncoated Si tips. The data were analyzed using the Fowler-Nordheim (F-N) theory and a contact tunneling model. The effective work function of electron emission is interpreted as due to the contact tunneling of electrons from the Fermi level of sp2 clusters to the conduction band of sp3 clusters. Analysis also shows that the low work function (several hundred meV) of DLC coated flat Si surfaces deduced from the F-N analysis is far deviated from the real situation.
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