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Trends in Vacuum Science & Technology   Volumes    Volume 5 
Abstract
Mechanism of electric field emission from DLC surfaces
Ahalapitiya H. Jayatissa, Fumio Sato, Nobuo Saito
Pages: 89 - 95
Number of pages: 7
Trends in Vacuum Science & Technology
Volume 5 

Copyright © 2002 Research Trends. All rights reserved

ABSTRACT

Field emission of electrons from diamond-like carbon (DLC) coated different Si surfaces is compared. Thin films of DLC were coated on smooth and rough surfaces of Si and Si micro-tips using pulsed ArF laser deposition. All DLC deposited surfaces exhibited electron emission in the electric field of 15-28 V/μm range which was lower than uncoated Si tips. The data were analyzed using the Fowler-Nordheim (F-N) theory and a contact tunneling model. The effective work function of electron emission is interpreted as due to the contact tunneling of electrons from the Fermi level of sp2 clusters to the conduction band of sp3 clusters. Analysis also shows that the low work function (several hundred meV) of DLC coated flat Si surfaces deduced from the F-N analysis is far deviated from the real situation.

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